The SCHUMACHER ATCS-15 is a high-precision absolute temperature control system designed for critical industrial and laboratory applications that require stable and accurate temperature regulation. Developed by SCHUMACHER, the ATCS-15 integrates advanced microprocessor-based PID closed-loop control technology, ensuring reliable performance and consistent temperature stability. With a compact modular design and user-friendly operation, the SCHUMACHER ATCS-15 is widely recognized in fields such as semiconductor manufacturing and precision chemical processing, providing a cost-effective and efficient temperature control solution for small-volume liquid temperature management.
Application Fields
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Semiconductor Manufacturing: Used for temperature control of liquid source chemicals in CVD (Chemical Vapor Deposition) and diffusion processes, ensuring the stability of thin film deposition quality.
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Microelectronics/Wafer Processing: Suitable for constant-temperature transportation of high-purity reagents and precursors (such as TEOS, TMB) in wafer fabrication processes.
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Vacuum/Film Deposition: Applied in vapor generation and transportation systems that require precise temperature stability to maintain process consistency.
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Laboratory & Precision Industry: Ideal for small-volume (≤1.5L) liquid precision temperature control scenarios in laboratories, pharmaceutical, and chemical industries, where high temperature accuracy is required.
Specification Parameters (Table)
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Parameter Item
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Specification Details
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Product Model
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SCHUMACHER ATCS-15
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Control Type
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Absolute Temperature Control System (Microprocessor PID Closed-Loop)
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Temperature Control Range
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+10°C to +60°C (Standard); 10°C–22°C (Partial Versions)
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Temperature Accuracy (Set Point)
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±0.1°C (Standard Accuracy of ATCS-15)
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Long-Term Temperature Stability
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±0.2°C (Steady-State Fluctuation of ATCS-15)
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Container Compatibility
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1500cc Quartz Container / 1.2L Stainless Steel Container (Standard Configuration of SCHUMACHER ATCS-15)
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Liquid Level Monitoring
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Quartz: 100%/50%/25%/15% Discrete Sensing; Stainless Steel: 100%/75%/15%
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Safety Alarm
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Temperature Deviation ±5°C Alarm; 15% Low Liquid Level Alarm; Over-Temperature Cutoff (50°C)
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Communication Interface
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DDC Remote Control/Monitoring Interface (Standard Configuration ofATCS-15)
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Power Supply
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100–240 VAC, 50/60 Hz (Global Universal)
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Dimensions (L×W×H)
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305 × 230 × 180 mm (12 × 9 × 7 in)
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Weight
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5.4 kg (12 lb)
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Structural Features
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Modular Design; Front Removable Source Cup; Stainless Steel Version Integrates Liquid Level Sensing and Cover Heater
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Product Function
As a high-precision temperature control device, the SCHUMACHER ATCS-15 mainly undertakes the following core functions:
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Provides ±0.1°C level precise temperature control for liquid source chemicals in CVD/diffusion processes, effectively ensuring the quality and process consistency of thin film deposition.
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Integrates microprocessor closed-loop control technology, which can suppress environmental interference and maintain long-term temperature stability with a fluctuation range of ≤±0.2°C.
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Adapts to 1500mL quartz containers or 1.2L stainless steel containers, and is equipped with liquid level monitoring and safety interlock functions to realize unattended operation.
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Supports DDC remote monitoring and control, which can be connected to the factory automation network to meet the standardized integration needs of semiconductor production lines.
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