ZYGO ZMI-4104 measuring electronic board
The ZYGO ZMI-4104 represents the pinnacle of laser interferometric measurement technology within the ZMI 2000 series platform. Designed for ultra-precision motion control systems, this multi-axis measurement board delivers 0.1nm resolution with ±0.5ppm linearity error across its 4-channel differential interferometer inputs. The ZMI-4104 integrates Zygo’s patented Dynamic Signal Correction (DSC) algorithm, eliminating environmental vibration interference in semiconductor lithography and nano-positioning applications.
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